A Simple Model to Describe the Rule of Glancing Angle Deposition
نویسندگان
چکیده
منابع مشابه
Designing Nanostructures by Glancing Angle Deposition
Three-dimensional nanostructures can be fabricated by the glancing angle deposition technique. By rotating the substrate in both polar and azimuthal directions, one can fabricate desired nanostructures, such as nanorod arrays with different shapes, nanospring arrays, and even multilayer nanostructures. This method offers a fully three-dimensional control of the nanostructure with additional cap...
متن کاملGrowth competition during glancing angle deposition of nanorod honeycomb arrays
Arrays of Ta nanorods were grown by glancing angle deposition GLAD onto honeycomb Cr nanodot patterns that were evaporated onto Si substrates through a self-assembled monolayer of SiO2 nanospheres. Statistical size analyses from arrays of rods with variable average length l and width w, with 210 nm l 650 nm and 109 nm w 304 nm, show that the distribution in w broadens with increasing l and decr...
متن کاملDevelopment of two-level porosity during glancing angle deposition
Porous Ta and Al layers that exhibit 280-nm-wide micropores, which are interconnected by 5–50-nm-wide nanopores, were grown by glancing angle deposition GLAD . The micropore nucleation is facilitated by patterning Si 001 substrates with inverted-pyramidal pit arrays using anisotropic etching through lithographic masks obtained by colloidal self-assembly. The microstructure consists of vertical ...
متن کاملNanospring pressure sensors grown by glancing angle deposition.
Arrays of Cr zigzag nanosprings and slanted nanorods, 15-55 nm and 40-80-nm-wide, respectively, were grown on SiO2/Si substrates by glancing angle deposition. The arrays exhibit a reversible change in resistivity upon loading and unloading, by 50% for nanosprings and 5% for nanorods, indicating their potential as pressure sensors. The resistivity drop is due to a compression of nanosprings (by ...
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ژورنال
عنوان ژورنال: MATERIALS TRANSACTIONS
سال: 2011
ISSN: 1345-9678,1347-5320
DOI: 10.2320/matertrans.m2010342